Silane
Specifications
| Gas | Silane | Gas Density | 1.11 |
|---|---|---|---|
| Chemical Symbol | SiH4 | Detection Principle | Electrochemical |
| PEL (ppm) | 5 | LEL (%) | |
| IDHL (ppm) | UEL (%) | ||
| Industries | Chemical Process, Semiconductor & Electronic Manufacturing |
Products
- Custom solutions are available for Silane.
Contact CONSPEC for a custom Silane solution.